JPS6413120U - - Google Patents
Info
- Publication number
- JPS6413120U JPS6413120U JP10594387U JP10594387U JPS6413120U JP S6413120 U JPS6413120 U JP S6413120U JP 10594387 U JP10594387 U JP 10594387U JP 10594387 U JP10594387 U JP 10594387U JP S6413120 U JPS6413120 U JP S6413120U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- heat insulator
- pull
- semiconductor wafer
- jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012212 insulator Substances 0.000 claims description 3
- 239000010453 quartz Substances 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 239000000428 dust Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10594387U JPS6413120U (en]) | 1987-07-10 | 1987-07-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10594387U JPS6413120U (en]) | 1987-07-10 | 1987-07-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6413120U true JPS6413120U (en]) | 1989-01-24 |
Family
ID=31339010
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10594387U Pending JPS6413120U (en]) | 1987-07-10 | 1987-07-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6413120U (en]) |
-
1987
- 1987-07-10 JP JP10594387U patent/JPS6413120U/ja active Pending